Product Features and Uses:

The reaction sintered silicon carbide cantilever propeller is a key component of the semiconductor wafer loading system.

The cantilever propeller has stable performance, does not deform in high-temperature environments, and has a large

wafer loading capacity, making it suitable for robot automatic loading and handling systems. Due to the stable and non deformable cross-section of the cantilever propeller, it is possible to prepare larger sized wafers using

existing furnace tubes. The thermal expansion coefficient of the cantilever propeller is similar to that of the LPCVD coating, and its application in LPCVD greatly prolongs the maintenance and cleaning cycle and significantly reduces pollutants.